Abstract
Josephson junction spectroscopy is a powerful local microwave spectroscopy technique that has promising potential as a diagnostic tool to probe the microscopic origins of noise in superconducting qubits. We present advancements toward realizing Josephson junction spectroscopy in a scanning geometry, where the Josephson junction is formed between a superconducting sample and a high capacitance superconducting STM tip. Data from planar Nb-based Josephson junction devices first demonstrate the benefits of including a high capacitance shunt across the junction, which decreases linewidth and improves performance at elevated temperatures. We show how an equivalent circuit can be implemented by utilizing a planarized STM tip with local prominences, which are fabricated via electron beam lithography and reactive ion etching, followed by coating with a superconduct- ing layer. Differential conductance measurements on a superconducting NbN surface demonstrate the ability of these high capacitance tips to decrease both thermal noise and P(E)-broadening in comparison to typical wire tips.